Wide-spectral range DUV – MIR spectroscopic ellipsometry study of PECVD-grown silicon oxide and nitride thinfims: Wide-spectral range DUV – MIR spectroscopic ellipsometry study of PECVD-grown silicon oxide and nitride thinfims

Syed Munir Azeem, Jasmin Spettel, Andrianov Nikolai, Jeremy Streque, Tommaso Cassese, Julian Pilz, Dmytro Solonenko, Clément Fleury, Florian Dubois, Yanfen Zhai, Norbert Cselyuszka, Andreas Tortschanoff, Mohssen Moridi, Thang Duy Dao

Publikation: Konferenzbeitrag › Poster › Begutachtung

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Physik & Astronomy