Abstract
New hybrid bulk-surface acoustic wave resonators using scandium doped aluminium nitride thin films were simulated, using material constants from piezoelectric measurement techniques for thin films. Afterwards they were fabricated and an electromechanical coupling of 4.3% was achieved.
Originalsprache | Englisch |
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Titel | Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication |
Seiten | 565-566 |
Seitenumfang | 2 |
DOIs | |
Publikationsstatus | Veröffentlicht - 9 Juli 2017 |
Veranstaltung | 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium - Besancon, Frankreich Dauer: 9 Juli 2017 → 13 Juli 2017 |
Konferenz
Konferenz | 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium |
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Kurztitel | EFTF/IFCS |
Land/Gebiet | Frankreich |
Ort | Besancon |
Zeitraum | 9/07/17 → 13/07/17 |