Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication

Vladimir Pashchenko; Stefan  Mertin; Fazel  Parsapour; Sylvain  Ballandras; Paul Muralt

doi:10.1109/FCS.2017.8088958

Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication

Vladimir Pashchenko, Stefan Mertin, Fazel Parsapour, Sylvain Ballandras, Paul Muralt

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Abstract

New hybrid bulk-surface acoustic wave resonators using scandium doped aluminium nitride thin films were simulated, using material constants from piezoelectric measurement techniques for thin films. Afterwards they were fabricated and an electromechanical coupling of 4.3% was achieved.

Original language	English
Title of host publication	Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication
Pages	565-566
Number of pages	2
DOIs	https://doi.org/10.1109/FCS.2017.8088958
Publication status	Published - 9 Jul 2017
Event	2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium - Besancon, France Duration: 9 Jul 2017 → 13 Jul 2017

Conference

Conference	2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium
Abbreviated title	EFTF/IFCS
Country/Territory	France
City	Besancon
Period	9/07/17 → 13/07/17

Keywords

aluminium scandium nitride
bulk acoustic wave
Surface acoustic waves
thin-film resonators
piezoelectric properties
Electromechanical coupling coefficient

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10.1109/FCS.2017.8088958

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@inproceedings{70f03b9810a7481496f254dcffa8aa90,

title = "Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication",

abstract = "New hybrid bulk-surface acoustic wave resonators using scandium doped aluminium nitride thin films were simulated, using material constants from piezoelectric measurement techniques for thin films. Afterwards they were fabricated and an electromechanical coupling of 4.3% was achieved.",

keywords = "aluminium scandium nitride, bulk acoustic wave, Surface acoustic waves, thin-film resonators, piezoelectric properties, Electromechanical coupling coefficient",

author = "Vladimir Pashchenko and Stefan Mertin and Fazel Parsapour and Sylvain Ballandras and Paul Muralt",

year = "2017",

month = jul,

day = "9",

doi = "10.1109/FCS.2017.8088958",

language = "English",

pages = "565--566",

booktitle = "Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication",

note = "2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium , EFTF/IFCS ; Conference date: 09-07-2017 Through 13-07-2017",

}

Pashchenko, V, Mertin, S, Parsapour, F, Ballandras, S & Muralt, P 2017, Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication. in Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication. pp. 565-566, 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium , Besancon, France, 9/07/17. https://doi.org/10.1109/FCS.2017.8088958

TY - GEN

T1 - Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication

AU - Pashchenko, Vladimir

AU - Mertin, Stefan

AU - Parsapour, Fazel

AU - Ballandras, Sylvain

AU - Muralt, Paul

PY - 2017/7/9

Y1 - 2017/7/9

N2 - New hybrid bulk-surface acoustic wave resonators using scandium doped aluminium nitride thin films were simulated, using material constants from piezoelectric measurement techniques for thin films. Afterwards they were fabricated and an electromechanical coupling of 4.3% was achieved.

AB - New hybrid bulk-surface acoustic wave resonators using scandium doped aluminium nitride thin films were simulated, using material constants from piezoelectric measurement techniques for thin films. Afterwards they were fabricated and an electromechanical coupling of 4.3% was achieved.

KW - aluminium scandium nitride

KW - bulk acoustic wave

KW - Surface acoustic waves

KW - thin-film resonators

KW - piezoelectric properties

KW - Electromechanical coupling coefficient

U2 - 10.1109/FCS.2017.8088958

DO - 10.1109/FCS.2017.8088958

M3 - Conference Paper

SP - 565

EP - 566

BT - Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication

T2 - 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium

Y2 - 9 July 2017 through 13 July 2017

ER -

Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication

Abstract

Conference

Keywords

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