Abstract
Dual mode bulk acoustic wave resonators were fabricated using tilted c-axis oriented grains. In this case, longitudinal and shear modes are excited at the same time. The stiffness matrix for the tilted geometry was derived, and served to determine c 33 and c 44 from the two basic resonance frequencies. In addition, it was possible to estimate the tilting angle from the ratio of the sound velocities.
Originalsprache | Englisch |
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Titel | Material constants extraction for AlScN thin films using a dual mode baw resonator |
ISBN (elektronisch) | 2160-1968 |
DOIs | |
Publikationsstatus | Veröffentlicht - 26 Apr. 2018 |
Veranstaltung | 2018 IEEE Micro Electro Mechanical Systems - Belfast, Großbritannien/Vereinigtes Königreich Dauer: 21 Jän. 2018 → 25 Jän. 2018 |
Konferenz
Konferenz | 2018 IEEE Micro Electro Mechanical Systems |
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Kurztitel | MEMS |
Land/Gebiet | Großbritannien/Vereinigtes Königreich |
Ort | Belfast |
Zeitraum | 21/01/18 → 25/01/18 |