Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

Vladimir Pashchenko; Fazel  Parsapour; Sylvain  Ballandras; Ken  Haffner; Paul Muralt

doi:10.1109/ULTSYM.2017.8091929

Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

Vladimir Pashchenko, Fazel Parsapour, Sylvain Ballandras, Ken Haffner, Paul Muralt

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung

Abstract

Acoustic delay lines based on Al 0.85 Sc 0.15 N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to efficiently excite a traveling surface acoustic wave (SAW) through the BAW piston motion. Test devices based on the 2.5 um thick Al 0.85 Sc 0.15 N piezoelectric film on the silicon substrate were fabricated and characterized.

Originalsprache	Englisch
Titel	Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer
Seiten	1-3
Seitenumfang	3
DOIs	https://doi.org/10.1109/ULTSYM.2017.8091929
Publikationsstatus	Veröffentlicht - 6 Sep. 2017
Veranstaltung	2017 IEEE International Ultrasonics Symposium - Washington, USA/Vereinigte Staaten Dauer: 6 Sep. 2017 → 9 Sep. 2017

Konferenz

Konferenz	2017 IEEE International Ultrasonics Symposium
Kurztitel	IUS 2017
Land/Gebiet	USA/Vereinigte Staaten
Ort	Washington
Zeitraum	6/09/17 → 9/09/17

Zugriff auf Dokument

10.1109/ULTSYM.2017.8091929

Dieses zitieren

Pashchenko, V., Parsapour, F., Ballandras, S., Haffner, K., & Muralt, P. (2017). Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer. in Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer (S. 1-3) https://doi.org/10.1109/ULTSYM.2017.8091929

@inproceedings{8023c22b25e2405dbebfacbc9535f0e6,

title = "Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer",

abstract = "Acoustic delay lines based on Al 0.85 Sc 0.15 N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to efficiently excite a traveling surface acoustic wave (SAW) through the BAW piston motion. Test devices based on the 2.5 um thick Al 0.85 Sc 0.15 N piezoelectric film on the silicon substrate were fabricated and characterized.",

author = "Vladimir Pashchenko and Fazel Parsapour and Sylvain Ballandras and Ken Haffner and Paul Muralt",

year = "2017",

month = sep,

day = "6",

doi = "10.1109/ULTSYM.2017.8091929",

language = "English",

pages = "1--3",

booktitle = "Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer",

note = "2017 IEEE International Ultrasonics Symposium, IUS 2017 ; Conference date: 06-09-2017 Through 09-09-2017",

}

Pashchenko, V, Parsapour, F, Ballandras, S, Haffner, K & Muralt, P 2017, Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer. in Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer. S. 1-3, 2017 IEEE International Ultrasonics Symposium, Washington, District of Columbia, USA/Vereinigte Staaten, 6/09/17. https://doi.org/10.1109/ULTSYM.2017.8091929

Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer. / Pashchenko, Vladimir; Parsapour, Fazel ; Ballandras, Sylvain et al.
Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer. 2017. S. 1-3.

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung

TY - GEN

T1 - Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

AU - Pashchenko, Vladimir

AU - Parsapour, Fazel

AU - Ballandras, Sylvain

AU - Haffner, Ken

AU - Muralt, Paul

PY - 2017/9/6

Y1 - 2017/9/6

N2 - Acoustic delay lines based on Al 0.85 Sc 0.15 N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to efficiently excite a traveling surface acoustic wave (SAW) through the BAW piston motion. Test devices based on the 2.5 um thick Al 0.85 Sc 0.15 N piezoelectric film on the silicon substrate were fabricated and characterized.

AB - Acoustic delay lines based on Al 0.85 Sc 0.15 N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to efficiently excite a traveling surface acoustic wave (SAW) through the BAW piston motion. Test devices based on the 2.5 um thick Al 0.85 Sc 0.15 N piezoelectric film on the silicon substrate were fabricated and characterized.

U2 - 10.1109/ULTSYM.2017.8091929

DO - 10.1109/ULTSYM.2017.8091929

M3 - Conference Paper

SP - 1

EP - 3

BT - Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

T2 - 2017 IEEE International Ultrasonics Symposium

Y2 - 6 September 2017 through 9 September 2017

ER -

Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

Abstract

Konferenz

Zugriff auf Dokument

Fingerprint

Dieses zitieren