Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

Vladimir Pashchenko, Fazel Parsapour, Sylvain Ballandras, Ken Haffner, Paul Muralt

    Research output: Conference proceeding/Chapter in Book/Report/Conference Paperpeer-review

    Abstract

    Acoustic delay lines based on Al 0.85 Sc 0.15 N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to efficiently excite a traveling surface acoustic wave (SAW) through the BAW piston motion. Test devices based on the 2.5 um thick Al 0.85 Sc 0.15 N piezoelectric film on the silicon substrate were fabricated and characterized.
    Original languageEnglish
    Title of host publicationEffective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer
    Pages1-3
    Number of pages3
    DOIs
    Publication statusPublished - 6 Sept 2017
    Event2017 IEEE International Ultrasonics Symposium - Washington, United States
    Duration: 6 Sept 20179 Sept 2017

    Conference

    Conference2017 IEEE International Ultrasonics Symposium
    Abbreviated titleIUS 2017
    Country/TerritoryUnited States
    CityWashington
    Period6/09/179/09/17

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