Abstract
Acoustic delay lines based on Al 0.85 Sc 0.15 N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to efficiently excite a traveling surface acoustic wave (SAW) through the BAW piston motion. Test devices based on the 2.5 um thick Al 0.85 Sc 0.15 N piezoelectric film on the silicon substrate were fabricated and characterized.
Original language | English |
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Title of host publication | Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer |
Pages | 1-3 |
Number of pages | 3 |
DOIs | |
Publication status | Published - 6 Sept 2017 |
Event | 2017 IEEE International Ultrasonics Symposium - Washington, United States Duration: 6 Sept 2017 → 9 Sept 2017 |
Conference
Conference | 2017 IEEE International Ultrasonics Symposium |
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Abbreviated title | IUS 2017 |
Country/Territory | United States |
City | Washington |
Period | 6/09/17 → 9/09/17 |