A novel approach to characterize the sodium contamination caused by gas filling during anodic bonding

张俞骋, Francesco Solazzi, Norbert Cselyuszka, Kurt Sorschag, Nikolai Andrianov, Mannuel Bauscher, Michael Schiffer, Klaus-Dieter Lang, Mohssen Moridi, Martin Schneider-Ramelow

Piezoelectric Microsystem Technologies (PMT)
Integrated Photonics Technologies (IPT)
SAL MicroFab
Microsystems Technologies

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung

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A novel approach to characterize the sodium contamination caused by gas filling during anodic bonding

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Physik & Astronomy