A novel approach to characterize the sodium contamination caused by gas filling during anodic bonding

张 俞骋, Francesco Solazzi, Norbert Cselyuszka, Kurt Sorschag, Nikolai Andrianov, Mannuel Bauscher, Michael Schiffer, Klaus-Dieter Lang, Mohssen Moridi, Martin Schneider-Ramelow

Research output: Conference proceeding/Chapter in Book/Report/Conference Paperpeer-review

Fingerprint

Dive into the research topics of 'A novel approach to characterize the sodium contamination caused by gas filling during anodic bonding'. Together they form a unique fingerprint.

Physics & Astronomy