ASSIC - Project 1.3 RF-MEMS

Physik & Astronomy

1. hafnium 100%
2. seeds 74%
3. solid solutions 66%
4. thin films 57%
5. microstructure 52%
6. sputtering 37%
7. wurtzite 30%
8. nitrides 26%
9. yttrium 21%
10. textures 20%
11. microelectromechanical systems 17%
12. filters 17%
13. atomic force microscopy 13%
14. halites 13%
15. laser interferometry 12%
16. scanning electron microscopy 11%
17. scandium 10%
18. epitaxy 9%
19. homogeneity 9%
20. gas mixtures 9%
21. interlayers 9%
22. performance 8%
23. curves 8%
24. buffers 8%
25. coupling coefficients 8%
26. platforms 8%
27. microphones 8%
28. compatibility 8%
29. substitutes 8%
30. physical properties 7%
31. costs 7%
32. wafers 7%
33. templates 7%
34. CMOS 7%
35. resonant frequencies 7%
36. thermal stability 7%
37. Q factors 7%
38. ceramics 6%
39. magnetron sputtering 6%
40. routes 6%
41. transducers 6%
42. chambers 6%
43. physics 6%
44. direct current 6%
45. argon 6%
46. oxides 6%
47. grain size 6%
48. optics 5%
49. characterization 5%
50. aluminum 5%
51. coefficients 5%
52. predictions 5%
53. transmission electron microscopy 5%
54. gradients 5%
55. spectroscopy 5%