Physics & Astronomy
hafnium
100%
seeds
74%
solid solutions
66%
thin films
57%
microstructure
52%
sputtering
37%
wurtzite
30%
nitrides
26%
yttrium
21%
textures
20%
microelectromechanical systems
17%
filters
17%
atomic force microscopy
13%
halites
13%
laser interferometry
12%
scanning electron microscopy
11%
scandium
10%
epitaxy
9%
homogeneity
9%
gas mixtures
9%
interlayers
9%
performance
8%
curves
8%
buffers
8%
coupling coefficients
8%
platforms
8%
microphones
8%
compatibility
8%
substitutes
8%
physical properties
7%
costs
7%
wafers
7%
templates
7%
CMOS
7%
resonant frequencies
7%
thermal stability
7%
Q factors
7%
ceramics
6%
magnetron sputtering
6%
routes
6%
transducers
6%
chambers
6%
physics
6%
direct current
6%
argon
6%
oxides
6%
grain size
6%
optics
5%
characterization
5%
aluminum
5%
coefficients
5%
predictions
5%
transmission electron microscopy
5%
gradients
5%
spectroscopy
5%