Microsystems Technologies

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2022
Highly textured AlN and Al0.7Sc0.3N piezoelectric thin films with Hf(0002) seed layer
Risquez, S., Pilz, J., Röbisch, V., Nellinilkkum Thadathil Jolly, G., Howell, K., Mazzalai, A., Heinz, B., Moridi, M. & Solonenko, D., 16 Aug. 2022.
Publikation: Konferenzbeitrag › Abstract › Begutachtung
High Performance Acoustofluidic Particle Focusing in Silicon-Based and Polymer-Based Devices Using Lateral Modes of Plate Transducers
Fuchsluger, K., De Pastina, A., Cselyuszka, N., Andrianov, N., Roshanghias, A., Ecker, R., Mitteramskogler, K., Voglhuber-Brunnmaier, K., Moridi, M. & Jakoby, B., 20 Okt. 2022.
Publikation: Konferenzbeitrag › Abstract › Begutachtung

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