Microsystems Technologies

Physik & Astronomy

1. transducers 100%
2. chips 74%
3. silicon nitrides 46%
4. thin films 42%
5. microelectromechanical systems 40%
6. harmonics 37%
7. nitrides 30%
8. hafnium 29%
9. silicon 29%
10. actuation 29%
11. photonics 27%
12. gases 26%
13. high aspect ratio 25%
14. silicon oxides 25%
15. ellipsometry 23%
16. metal oxides 23%
17. seeds 22%
18. etching 21%
19. contamination 21%
20. sodium 21%
21. heat generation 21%
22. transition metals 20%
23. holders 20%
24. solid solutions 19%
25. pixels 19%
26. performance 18%
27. vapor deposition 18%
28. flux density 18%
29. ultrasonics 18%
30. membranes 17%
31. low frequencies 16%
32. waveguides 16%
33. microstructure 15%
34. acoustics 14%
35. fabrication 14%
36. polymers 14%
37. platforms 14%
38. bolometers 13%
39. temperature 12%
40. paradoxes 12%
41. oxides 11%
42. sensors 11%
43. wavelengths 11%
44. deviation 11%
45. sputtering 11%
46. scandium 10%
47. fluids 10%
48. elastic waves 10%
49. temperature gradients 10%
50. geometry 10%
51. modes (standing waves) 9%
52. crystallization 9%
53. wurtzite 8%
54. wafers 8%
55. simulation 8%
56. resistors 8%
57. vacuum 7%
58. monitors 7%
59. composite materials 7%
60. gas flow 7%
61. shielding 7%
62. low pressure 6%
63. electric potential 6%
64. yttrium 6%
65. electronics 6%
66. characterization 6%
67. textures 6%
68. nitrogen 5%
69. nanofabrication 5%
70. CMOS 5%
71. vibration mode 5%
72. phonons 5%
73. optical properties 5%
74. filters 5%
75. electrical resistivity 5%