Wafer-level vacuum packaged translatory MEMS mirror with large stroke for compact NIR-FT spectrometers

Thilo Sauter, Eric Gaumont, Thomas Graßhoff, Tobias Seifert, Gerald Auböck, J. Grahmann

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Original language	English
Title of host publication	Proceedings Volume 12434, MOEMS and Miniaturized Systems XXII, 124340X
DOIs	https://doi.org/10.1117/12.2668624
Publication status	Published - 2023

Access to Document

@inproceedings{87dedd4062574834b863d95e98e4e2ab,

title = "Wafer-level vacuum packaged translatory MEMS mirror with large stroke for compact NIR-FT spectrometers",

author = "Thilo Sauter and Eric Gaumont and Thomas Gra{\ss}hoff and Tobias Seifert and Gerald Aub{\"o}ck and J. Grahmann",

year = "2023",

doi = "10.1117/12.2668624",

language = "English",

booktitle = "Proceedings Volume 12434, MOEMS and Miniaturized Systems XXII, 124340X",

}

TY - GEN

T1 - Wafer-level vacuum packaged translatory MEMS mirror with large stroke for compact NIR-FT spectrometers

AU - Sauter, Thilo

AU - Gaumont, Eric

AU - Graßhoff, Thomas

AU - Seifert, Tobias

AU - Auböck, Gerald

AU - Grahmann, J.

PY - 2023

Y1 - 2023

U2 - 10.1117/12.2668624

DO - 10.1117/12.2668624

M3 - Conference Paper

BT - Proceedings Volume 12434, MOEMS and Miniaturized Systems XXII, 124340X

ER -