Varifocal scanning micro-mirror fabricated from silicon-on-insulator wafer

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969716
Publication status	Published - 2011

Access to Document

@inproceedings{470b3dd9426d471eb76bf48ba516a685,

title = "Varifocal scanning micro-mirror fabricated from silicon-on-insulator wafer",

author = "T. Sasaki and K. Hane",

year = "2011",

doi = "10.1109/TRANSDUCERS.2011.5969716",

language = "undefiniert/unbekannt",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

}

TY - GEN

T1 - Varifocal scanning micro-mirror fabricated from silicon-on-insulator wafer

AU - Sasaki, T.

AU - Hane, K.

PY - 2011

Y1 - 2011

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-80052133410&partnerID=MN8TOARS

U2 - 10.1109/TRANSDUCERS.2011.5969716

DO - 10.1109/TRANSDUCERS.2011.5969716

M3 - Konferenzartikel

BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

ER -