Varifocal mirror integrated with scanner using wafer bonding technology

K. Nakazawa, T. Sasaki, H. Furuta, J. Kamiya, H. Sasaki, T. Kamiya, K. Hane

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	International Conference on Optical MEMS and Nanophotonics
DOIs	https://doi.org/10.1109/OMN.2016.7565907
Publication status	Published - 2016

Access to Document

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title = "Varifocal mirror integrated with scanner using wafer bonding technology",

author = "K. Nakazawa and T. Sasaki and H. Furuta and J. Kamiya and H. Sasaki and T. Kamiya and K. Hane",

year = "2016",

doi = "10.1109/OMN.2016.7565907",

language = "undefiniert/unbekannt",

booktitle = "International Conference on Optical MEMS and Nanophotonics",

}

TY - GEN

T1 - Varifocal mirror integrated with scanner using wafer bonding technology

AU - Nakazawa, K.

AU - Sasaki, T.

AU - Furuta, H.

AU - Kamiya, J.

AU - Sasaki, H.

AU - Kamiya, T.

AU - Hane, K.

PY - 2016

Y1 - 2016

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84990239539&partnerID=MN8TOARS

U2 - 10.1109/OMN.2016.7565907

DO - 10.1109/OMN.2016.7565907

M3 - Konferenzartikel

BT - International Conference on Optical MEMS and Nanophotonics

ER -