Varifocal micromirror integrated with comb-drive scanner on silicon-on-insulator wafer

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Journal of Microelectromechanical Systems
DOIs	https://doi.org/10.1109/JMEMS.2012.2189936
Publication status	Published - 2012

Access to Document

TY - JOUR

T1 - Varifocal micromirror integrated with comb-drive scanner on silicon-on-insulator wafer

AU - Sasaki, T.

AU - Hane, K.

PY - 2012

Y1 - 2012

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84864612958&partnerID=MN8TOARS

U2 - 10.1109/JMEMS.2012.2189936

DO - 10.1109/JMEMS.2012.2189936

M3 - Artikel

SN - 1057-7157

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

ER -