Two-Dimensional Piezoelectrically Actuated Micromirror with Fast Focusing Function

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel

Originalsprache	Englisch
Titel	2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMS58180.2024.10439446
Publikationsstatus	Veröffentlicht - 22 Jän. 2024

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@inproceedings{c9f5ec33d85d47cf8d3d25cbcc3e369f,

title = "Two-Dimensional Piezoelectrically Actuated Micromirror with Fast Focusing Function",

author = "Takashi Sasaki and Adrien Piot and Cl{\'e}ment Fleury and {Rodrigues Palma Guerreiro}, Sara and Rocha, {Rodrigo Tumolin} and Anton Lagosh",

year = "2024",

month = jan,

day = "22",

doi = "10.1109/MEMS58180.2024.10439446",

language = "English",

booktitle = "2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)",

}

TY - GEN

T1 - Two-Dimensional Piezoelectrically Actuated Micromirror with Fast Focusing Function

AU - Sasaki, Takashi

AU - Piot, Adrien

AU - Fleury, Clément

AU - Rodrigues Palma Guerreiro, Sara

AU - Rocha, Rodrigo Tumolin

AU - Lagosh, Anton

PY - 2024/1/22

Y1 - 2024/1/22

U2 - 10.1109/MEMS58180.2024.10439446

DO - 10.1109/MEMS58180.2024.10439446

M3 - Conference Paper

BT - 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

ER -