Original language | American English |
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Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
DOIs | |
Publication status | Published - 2018 |
Externally published | Yes |
Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
Julian Pilz, Alberto Perrotta, Paul Christian, Martin Tazreiter, Roland Resel, Günther Leising, Thomas Griesser, Anna Maria Coclite
Research output: Contribution to journal › Article › peer-review