Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

Julian Pilz; Alberto Perrotta; Paul Christian; Martin Tazreiter; Roland Resel; Günther Leising; Thomas Griesser; Anna Maria Coclite

doi:10.1116/1.5003334

Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

Julian Pilz, Alberto Perrotta, Paul Christian, Martin Tazreiter, Roland Resel, Günther Leising, Thomas Griesser, Anna Maria Coclite

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Originalsprache	Englisch (Amerika)
Fachzeitschrift	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
DOIs	https://doi.org/10.1116/1.5003334
Publikationsstatus	Veröffentlicht - 2018
Extern publiziert	Ja

Zugriff auf Dokument

10.1116/1.5003334

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http://www.scopus.com/inward/record.url?eid=2-s2.0-85037698565&partnerID=MN8TOARS

Dieses zitieren

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title = "Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature",

author = "Julian Pilz and Alberto Perrotta and Paul Christian and Martin Tazreiter and Roland Resel and G{\"u}nther Leising and Thomas Griesser and Coclite, {Anna Maria}",

year = "2018",

doi = "10.1116/1.5003334",

language = "Englisch (Amerika)",

}

TY - JOUR

T1 - Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

AU - Pilz, Julian

AU - Perrotta, Alberto

AU - Christian, Paul

AU - Tazreiter, Martin

AU - Resel, Roland

AU - Leising, Günther

AU - Griesser, Thomas

AU - Coclite, Anna Maria

PY - 2018

Y1 - 2018

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85037698565&partnerID=MN8TOARS

U2 - 10.1116/1.5003334

DO - 10.1116/1.5003334

M3 - Artikel

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

ER -