Tunable monocrystalline silicon grating on LSI circuit fabricated by two-step polymer bonding

T. Sasaki, T. Suzuki, H. Matsuura, K. Hane

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	International Conference on Optical MEMS and Nanophotonics
DOIs	https://doi.org/10.1109/OMN.2016.7565878
Publication status	Published - 2016

Access to Document

@inproceedings{75ad102cc3d544e2a019a1c1f984fa1e,

title = "Tunable monocrystalline silicon grating on LSI circuit fabricated by two-step polymer bonding",

author = "T. Sasaki and T. Suzuki and H. Matsuura and K. Hane",

year = "2016",

doi = "10.1109/OMN.2016.7565878",

language = "undefiniert/unbekannt",

booktitle = "International Conference on Optical MEMS and Nanophotonics",

}

TY - GEN

T1 - Tunable monocrystalline silicon grating on LSI circuit fabricated by two-step polymer bonding

AU - Sasaki, T.

AU - Suzuki, T.

AU - Matsuura, H.

AU - Hane, K.

PY - 2016

Y1 - 2016

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84990231534&partnerID=MN8TOARS

U2 - 10.1109/OMN.2016.7565878

DO - 10.1109/OMN.2016.7565878

M3 - Konferenzartikel

BT - International Conference on Optical MEMS and Nanophotonics

ER -