Tunable monocrystalline silicon grating on LSI circuit fabricated by two-step polymer bonding

T. Sasaki, T. Suzuki, H. Matsuura, K. Hane

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel

Originalsprache	undefiniert/unbekannt
Titel	International Conference on Optical MEMS and Nanophotonics
DOIs	https://doi.org/10.1109/OMN.2016.7565878
Publikationsstatus	Veröffentlicht - 2016

Zugriff auf Dokument

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title = "Tunable monocrystalline silicon grating on LSI circuit fabricated by two-step polymer bonding",

author = "T. Sasaki and T. Suzuki and H. Matsuura and K. Hane",

year = "2016",

doi = "10.1109/OMN.2016.7565878",

language = "undefiniert/unbekannt",

booktitle = "International Conference on Optical MEMS and Nanophotonics",

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TY - GEN

T1 - Tunable monocrystalline silicon grating on LSI circuit fabricated by two-step polymer bonding

AU - Sasaki, T.

AU - Suzuki, T.

AU - Matsuura, H.

AU - Hane, K.

PY - 2016

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DO - 10.1109/OMN.2016.7565878

M3 - Konferenzartikel

BT - International Conference on Optical MEMS and Nanophotonics

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