Transparent Lids for MEMS-based Photonic Integrated Circuits

Amirmohammad Miran Zadeh, Anton Lagosh, ‪Hernán Furci, Niels Quack

Research output: Contribution to conference (No Proceedings) › Poster › peer-review

Original language	English
Publication status	Published - 2021
Event	EPFL - MicroNanoFabrication Annual Review Meeting 2021 - Lausanne, Switzerland Duration: 4 May 2021 → 4 May 2021

Conference	EPFL - MicroNanoFabrication Annual Review Meeting 2021
Country/Territory	Switzerland
City	Lausanne
Period	4/05/21 → 4/05/21

Cite this

@conference{19f6ceb8d4104d2ebf5d3b43f536da4e,

title = "Transparent Lids for MEMS-based Photonic Integrated Circuits",

author = "{Miran Zadeh}, Amirmohammad and Anton Lagosh and ‪Hern{\'a}n Furci and Niels Quack",

year = "2021",

language = "English",

note = "EPFL - MicroNanoFabrication Annual Review Meeting 2021 ; Conference date: 04-05-2021 Through 04-05-2021",

}