Transparent Lids for MEMS-based Photonic Integrated Circuits

Amirmohammad Miran Zadeh, Anton Lagosh, ‪Hernán Furci, Niels Quack

Publikation: Konferenzbeitrag › Poster › Begutachtung

Originalsprache	Englisch
Publikationsstatus	Veröffentlicht - 2021
Veranstaltung	EPFL - MicroNanoFabrication Annual Review Meeting 2021 - Lausanne, Schweiz Dauer: 4 Mai 2021 → 4 Mai 2021

Konferenz	EPFL - MicroNanoFabrication Annual Review Meeting 2021
Land/Gebiet	Schweiz
Ort	Lausanne
Zeitraum	4/05/21 → 4/05/21

Dieses zitieren

@conference{19f6ceb8d4104d2ebf5d3b43f536da4e,

title = "Transparent Lids for MEMS-based Photonic Integrated Circuits",

author = "{Miran Zadeh}, Amirmohammad and Anton Lagosh and ‪Hern{\'a}n Furci and Niels Quack",

year = "2021",

language = "English",

note = "EPFL - MicroNanoFabrication Annual Review Meeting 2021 ; Conference date: 04-05-2021 Through 04-05-2021",

}