The Limits of the Post‐Growth Optimization of AlN Thin Films Grown on Si(111) via Magnetron Sputtering

Dmytro Solonenko, Constance Schmidt, Chris Stoeckel, Karla Hiller, Dietrich R. T. Zahn

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title = "The Limits of the Post‐Growth Optimization of AlN Thin Films Grown on Si(111) via Magnetron Sputtering",

author = "Dmytro Solonenko and Constance Schmidt and Chris Stoeckel and Karla Hiller and Zahn, {Dietrich R. T.}",

year = "2020",

month = may,

day = "15",

doi = "10.1002/pssb.201900400",

language = "undefiniert/unbekannt",

}

TY - JOUR

T1 - The Limits of the Post‐Growth Optimization of AlN Thin Films Grown on Si(111) via Magnetron Sputtering

AU - Solonenko, Dmytro

AU - Schmidt, Constance

AU - Stoeckel, Chris

AU - Hiller, Karla

AU - Zahn, Dietrich R. T.

PY - 2020/5/15

Y1 - 2020/5/15

UR - https://doi.org/10.1002/pssb.201900400

U2 - 10.1002/pssb.201900400

DO - 10.1002/pssb.201900400

M3 - Artikel

JO - physica status solidi (b)

JF - physica status solidi (b)

ER -