Study of the properties of Al:ZnO thin films grown by plasma-enhanced atomic layer deposition

Research output: Contribution to conference (No Proceedings)Abstractpeer-review

Original languageEnglish
Publication statusPublished - Jun 2019
Externally publishedYes
Event24th International Symposium on Plasma Chemistry - Napoli, Italy
Duration: 9 Jun 2019 → …

Conference

Conference24th International Symposium on Plasma Chemistry
Country/TerritoryItaly
CityNapoli
Period9/06/19 → …

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