Status and trends in modern micro- and nanotechnology

H. Brückl; R. Hainberger; R. Heer; A. Köck

doi:10.1007/BF03054375

Status and trends in modern micro- and nanotechnology

H. Brückl, R. Hainberger, R. Heer, A. Köck

Research output: Contribution to journal › Article › peer-review

Abstract

The recent development from micro- to nanotechnology enables new ideas and new physical effects to be implemented in both conventional and novel devices. Examples of fast developing fields in this context are electronic, photonic and magnetic components for sensor, memory, and logic applications. Optical lithography, the traditional path of patterning, is supplemented with sophisticated methods to access the nanoworld.

Original language	English
Pages (from-to)	442-445
Number of pages	4
Journal	Elektrotechnik und Informationstechnik
Volume	122
Issue number	12
DOIs	https://doi.org/10.1007/BF03054375
Publication status	Published - 2005
Externally published	Yes

Keywords

Logic programming
Photolithography
Photons
Sensors
Logic applications
Magnetic components
Microtechnology
Photonics
Nanotechnology

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title = "Status and trends in modern micro- and nanotechnology",

abstract = "The recent development from micro- to nanotechnology enables new ideas and new physical effects to be implemented in both conventional and novel devices. Examples of fast developing fields in this context are electronic, photonic and magnetic components for sensor, memory, and logic applications. Optical lithography, the traditional path of patterning, is supplemented with sophisticated methods to access the nanoworld.",

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KW - Photons

KW - Sensors

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KW - Photonics

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JO - Elektrotechnik und Informationstechnik

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Status and trends in modern micro- and nanotechnology

Abstract

Keywords

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