Status and trends in modern micro- and nanotechnology

H. Brückl; R. Hainberger; R. Heer; A. Köck

doi:10.1007/BF03054375

Status and trends in modern micro- and nanotechnology

H. Brückl, R. Hainberger, R. Heer, A. Köck

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Abstract

The recent development from micro- to nanotechnology enables new ideas and new physical effects to be implemented in both conventional and novel devices. Examples of fast developing fields in this context are electronic, photonic and magnetic components for sensor, memory, and logic applications. Optical lithography, the traditional path of patterning, is supplemented with sophisticated methods to access the nanoworld.

Originalsprache	Englisch
Seiten (von - bis)	442-445
Seitenumfang	4
Fachzeitschrift	Elektrotechnik und Informationstechnik
Jahrgang	122
Ausgabenummer	12
DOIs	https://doi.org/10.1007/BF03054375
Publikationsstatus	Veröffentlicht - 2005
Extern publiziert	Ja

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10.1007/BF03054375

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Status and trends in modern micro- and nanotechnology

Abstract

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