Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide

Anton Buchberger; Paul Maierhofer; Alexander Bergmann; Anderson Singulani; Martin Sagmeister; Victor Sidorov; Jochen Kraft; Marcus Baumgart; Andreas Tortschanoff

doi:10.1109/SENSORS43011.2019.8956493

Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide

Anton Buchberger, Paul Maierhofer, Alexander Bergmann, Anderson Singulani, Martin Sagmeister, Victor Sidorov, Jochen Kraft, Marcus Baumgart, Andreas Tortschanoff

Photonic Systems (PHOS)

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Abstract

The interaction between analytes and the evanescent field of a waveguide can be exploited for highly sensitive measurement devices, which find already wide usage as chemical and biological sensors. Based on this sensor principle, we designed a single particle detector, featuring a silicon nitride waveguide with sub-micron dimensions, a diode laser, and a photodetector. The first prototype provides single counting efficiency for PSL spheres down to a diameter of 200 nm.

Original language	English
Title of host publication	2019 IEEE SENSORS
Pages	1-4
Number of pages	4
DOIs	https://doi.org/10.1109/SENSORS43011.2019.8956493
Publication status	Published - 30 Oct 2019
Event	2019 IEEE SENSORS - Montreal, QC, Canada Duration: 27 Oct 2019 → 30 Oct 2019

Conference

Conference	2019 IEEE SENSORS
Period	27/10/19 → 30/10/19

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10.1109/SENSORS43011.2019.8956493

https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8956493

Cite this

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title = "Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide",

abstract = "The interaction between analytes and the evanescent field of a waveguide can be exploited for highly sensitive measurement devices, which find already wide usage as chemical and biological sensors. Based on this sensor principle, we designed a single particle detector, featuring a silicon nitride waveguide with sub-micron dimensions, a diode laser, and a photodetector. The first prototype provides single counting efficiency for PSL spheres down to a diameter of 200 nm.",

keywords = "biosensors, elemental semiconductors, optical sensors, optical waveguides, particle detectors, photodetectors, silicon compounds, single particle detector, evanescent field, silicon nitride waveguide, highly sensitive measurement devices, biological sensors, sensor principle, single counting efficiency, size 200.0 nm",

author = "Anton Buchberger and Paul Maierhofer and Alexander Bergmann and Anderson Singulani and Martin Sagmeister and Victor Sidorov and Jochen Kraft and Marcus Baumgart and Andreas Tortschanoff",

year = "2019",

month = oct,

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doi = "10.1109/SENSORS43011.2019.8956493",

language = "English",

isbn = "978-1-7281-1635-8",

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note = "2019 IEEE SENSORS ; Conference date: 27-10-2019 Through 30-10-2019",

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T1 - Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide

AU - Buchberger, Anton

AU - Maierhofer, Paul

AU - Bergmann, Alexander

AU - Singulani, Anderson

AU - Sagmeister, Martin

AU - Sidorov, Victor

AU - Kraft, Jochen

AU - Baumgart, Marcus

AU - Tortschanoff, Andreas

PY - 2019/10/30

Y1 - 2019/10/30

N2 - The interaction between analytes and the evanescent field of a waveguide can be exploited for highly sensitive measurement devices, which find already wide usage as chemical and biological sensors. Based on this sensor principle, we designed a single particle detector, featuring a silicon nitride waveguide with sub-micron dimensions, a diode laser, and a photodetector. The first prototype provides single counting efficiency for PSL spheres down to a diameter of 200 nm.

AB - The interaction between analytes and the evanescent field of a waveguide can be exploited for highly sensitive measurement devices, which find already wide usage as chemical and biological sensors. Based on this sensor principle, we designed a single particle detector, featuring a silicon nitride waveguide with sub-micron dimensions, a diode laser, and a photodetector. The first prototype provides single counting efficiency for PSL spheres down to a diameter of 200 nm.

KW - biosensors

KW - elemental semiconductors

KW - optical sensors

KW - optical waveguides

KW - particle detectors

KW - photodetectors

KW - silicon compounds

KW - single particle detector

KW - evanescent field

KW - silicon nitride waveguide

KW - highly sensitive measurement devices

KW - biological sensors

KW - sensor principle

KW - single counting efficiency

KW - size 200.0 nm

UR - https://ieeexplore.ieee.org/document/8956493/

U2 - 10.1109/SENSORS43011.2019.8956493

DO - 10.1109/SENSORS43011.2019.8956493

M3 - Conference Paper

SN - 978-1-7281-1635-8

SP - 1

EP - 4

BT - 2019 IEEE SENSORS

T2 - 2019 IEEE SENSORS

Y2 - 27 October 2019 through 30 October 2019

ER -

Single Particle Detector Using the Evanescent Field of a Silicon Nitride Waveguide

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