Abstract
The interaction between analytes and the evanescent field of a waveguide can be exploited for highly sensitive measurement devices, which find already wide usage as chemical and biological sensors. Based on this sensor principle, we designed a single particle detector, featuring a silicon nitride waveguide with sub-micron dimensions, a diode laser, and a photodetector. The first prototype provides single counting efficiency for PSL spheres down to a diameter of 200 nm.
Originalsprache | Englisch |
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Titel | 2019 IEEE SENSORS |
Seiten | 1-4 |
Seitenumfang | 4 |
DOIs | |
Publikationsstatus | Veröffentlicht - 30 Okt. 2019 |
Veranstaltung | 2019 IEEE SENSORS - Montreal, QC, Canada Dauer: 27 Okt. 2019 → 30 Okt. 2019 |
Konferenz
Konferenz | 2019 IEEE SENSORS |
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Zeitraum | 27/10/19 → 30/10/19 |
Schlagwörter
- biosensors
- elemental semiconductors
- optical sensors
- optical waveguides
- particle detectors
- photodetectors
- silicon compounds
- single particle detector
- evanescent field
- silicon nitride waveguide
- highly sensitive measurement devices
- biological sensors
- sensor principle
- single counting efficiency
- size 200.0 nm