| Original language | English |
|---|---|
| Pages (from-to) | 222-225 |
| Number of pages | 4 |
| Journal | Microelectronic Engineering |
| Volume | 98 |
| Publication status | Published - 2012 |
| Externally published | Yes |
Room temperature inductively coupled plasma etching of InAs/InSb in BCl3/Cl2/Ar
Research output: Contribution to journal › Article › peer-review