RESONANT d33 MODE PZT MEMS MIRROR EXCITED WITH DIRECTIONAL INTERDIGITATED ELECTRODES

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@inproceedings{37815e7798634968a475a18bae704129,

title = "RESONANT d33 MODE PZT MEMS MIRROR EXCITED WITH DIRECTIONAL INTERDIGITATED ELECTRODES",

author = "Pooja Thakkar and Anton Lagosh and Takashi Sasaki and Markus Bainschab and Jaka Pribosek",

year = "2023",

month = jan,

day = "2",

language = "English",

pages = "1127",

booktitle = "IEEE MEMS 2023",

}