Resonant d
              33
              Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes

Pooja Thakkar; Anton Lagosh; Takashi Sasaki; Markus Bainschab; Jaka Pribošek

doi:10.1109/MEMS49605.2023.10052304

Resonant d 33 Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes

Pooja Thakkar, Anton Lagosh, Takashi Sasaki, Markus Bainschab, Jaka Pribošek

Research output: Contribution to conference (No Proceedings) › Paper › peer-review

Original language	English
Pages	1127-1130
DOIs	https://doi.org/10.1109/MEMS49605.2023.10052304
Publication status	Published - 15 Jan 2023
Event	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) - Science Congress Center Munich Walther-von-Dyck Straße 10 , 85748 Garching bei München, Germany Duration: 15 Jan 2023 → 19 Jan 2023 https://mems23.org/

Conference

Conference	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Abbreviated title	IEEE MEMS 2023
Country/Territory	Germany
City	85748 Garching bei München
Period	15/01/23 → 19/01/23
Internet address	https://mems23.org/

Access to Document

10.1109/MEMS49605.2023.10052304

https://ieeexplore.ieee.org/document/10052304/

Cite this

Thakkar, P., Lagosh, A., Sasaki, T., Bainschab, M., & Pribošek, J. (2023). Resonant d 33 Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes. 1127-1130. Paper presented at 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 85748 Garching bei München, Bavaria, Germany. https://doi.org/10.1109/MEMS49605.2023.10052304

@conference{52cf20d8d7b549c581b202e756a42b9d,

title = "Resonant d 33 Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes",

author = "Pooja Thakkar and Anton Lagosh and Takashi Sasaki and Markus Bainschab and Jaka Pribo{\v s}ek",

year = "2023",

month = jan,

day = "15",

doi = "10.1109/MEMS49605.2023.10052304",

language = "English",

pages = "1127--1130",

note = "2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), IEEE MEMS 2023 ; Conference date: 15-01-2023 Through 19-01-2023",

url = "https://mems23.org/",

}

Thakkar, P , Lagosh, A , Sasaki, T, Bainschab, M & Pribošek, J 2023, 'Resonant d 33 Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes', Paper presented at 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 85748 Garching bei München, Germany, 15/01/23 - 19/01/23 pp. 1127-1130. https://doi.org/10.1109/MEMS49605.2023.10052304

Resonant d 33 Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes. / Thakkar, Pooja ; Lagosh, Anton ; Sasaki, Takashi et al.
2023. 1127-1130 Paper presented at 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 85748 Garching bei München, Bavaria, Germany.

Research output: Contribution to conference (No Proceedings) › Paper › peer-review

TY - CONF

T1 - Resonant d 33 Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes

AU - Thakkar, Pooja

AU - Lagosh, Anton

AU - Sasaki, Takashi

AU - Bainschab, Markus

AU - Pribošek, Jaka

PY - 2023/1/15

Y1 - 2023/1/15

U2 - 10.1109/MEMS49605.2023.10052304

DO - 10.1109/MEMS49605.2023.10052304

M3 - Paper

SP - 1127

EP - 1130

T2 - 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

Y2 - 15 January 2023 through 19 January 2023

ER -