Resonant d
              33
              Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes

Pooja Thakkar; Anton Lagosh; Takashi Sasaki; Markus Bainschab; Jaka Pribošek

doi:10.1109/MEMS49605.2023.10052304

Resonant d 33 Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes

Pooja Thakkar, Anton Lagosh, Takashi Sasaki, Markus Bainschab, Jaka Pribošek

Publikation: Konferenzbeitrag › Papier › Begutachtung

Originalsprache	Englisch
Seiten	1127-1130
DOIs	https://doi.org/10.1109/MEMS49605.2023.10052304
Publikationsstatus	Veröffentlicht - 15 Jän. 2023
Veranstaltung	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) - Science Congress Center Munich Walther-von-Dyck Straße 10 , 85748 Garching bei München, Deutschland Dauer: 15 Jän. 2023 → 19 Jän. 2023 https://mems23.org/

Konferenz

Konferenz	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Kurztitel	IEEE MEMS 2023
Land/Gebiet	Deutschland
Ort	85748 Garching bei München
Zeitraum	15/01/23 → 19/01/23
Internetadresse	https://mems23.org/

Zugriff auf Dokument

10.1109/MEMS49605.2023.10052304

https://ieeexplore.ieee.org/document/10052304/

Dieses zitieren

Thakkar, P., Lagosh, A., Sasaki, T., Bainschab, M., & Pribošek, J. (2023). Resonant d 33 Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes. 1127-1130. Beitrag in 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 85748 Garching bei München, Bayern, Deutschland. https://doi.org/10.1109/MEMS49605.2023.10052304

@conference{52cf20d8d7b549c581b202e756a42b9d,

title = "Resonant d 33 Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes",

author = "Pooja Thakkar and Anton Lagosh and Takashi Sasaki and Markus Bainschab and Jaka Pribo{\v s}ek",

year = "2023",

month = jan,

day = "15",

doi = "10.1109/MEMS49605.2023.10052304",

language = "English",

pages = "1127--1130",

note = "2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), IEEE MEMS 2023 ; Conference date: 15-01-2023 Through 19-01-2023",

url = "https://mems23.org/",

}

Thakkar, P , Lagosh, A , Sasaki, T, Bainschab, M & Pribošek, J 2023, 'Resonant d 33 Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes', Beitrag in 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 85748 Garching bei München, Deutschland, 15/01/23 - 19/01/23 S. 1127-1130. https://doi.org/10.1109/MEMS49605.2023.10052304

Resonant d 33 Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes. / Thakkar, Pooja ; Lagosh, Anton ; Sasaki, Takashi et al.
2023. 1127-1130 Beitrag in 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 85748 Garching bei München, Bayern, Deutschland.

Publikation: Konferenzbeitrag › Papier › Begutachtung

TY - CONF

T1 - Resonant d 33 Mode PZT Mems Mirror Excited with Directional Interdigitated Electrodes

AU - Thakkar, Pooja

AU - Lagosh, Anton

AU - Sasaki, Takashi

AU - Bainschab, Markus

AU - Pribošek, Jaka

PY - 2023/1/15

Y1 - 2023/1/15

U2 - 10.1109/MEMS49605.2023.10052304

DO - 10.1109/MEMS49605.2023.10052304

M3 - Paper

SP - 1127

EP - 1130

T2 - 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

Y2 - 15 January 2023 through 19 January 2023

ER -