Position encoding and phase control of resonant MOEMS mirrors

A. Tortschanoff, M. Lenzhofer, A. Frank, M. Wildenhain, T. Sandner, H. Schenk, W. Scherf, A. Kenda

Research output: Contribution to conference (No Proceedings)Paperpeer-review

Fingerprint

Dive into the research topics of 'Position encoding and phase control of resonant MOEMS mirrors'. Together they form a unique fingerprint.

Engineering & Materials Science