Piezoresistive displacement sensor integrated in resonant varifocal mirror

K. Nakazawa, T. Sasaki, H. Furuta, J. Kamiya, T. Kamiya, K. Hane

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	International Conference on Optical MEMS and Nanophotonics
DOIs	https://doi.org/10.1109/OMN.2015.7288895
Publication status	Published - 2015

Access to Document

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title = "Piezoresistive displacement sensor integrated in resonant varifocal mirror",

author = "K. Nakazawa and T. Sasaki and H. Furuta and J. Kamiya and T. Kamiya and K. Hane",

year = "2015",

doi = "10.1109/OMN.2015.7288895",

language = "undefiniert/unbekannt",

booktitle = "International Conference on Optical MEMS and Nanophotonics",

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TY - GEN

T1 - Piezoresistive displacement sensor integrated in resonant varifocal mirror

AU - Nakazawa, K.

AU - Sasaki, T.

AU - Furuta, H.

AU - Kamiya, J.

AU - Kamiya, T.

AU - Hane, K.

PY - 2015

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U2 - 10.1109/OMN.2015.7288895

DO - 10.1109/OMN.2015.7288895

M3 - Konferenzartikel

BT - International Conference on Optical MEMS and Nanophotonics

ER -