Optically flat micromirror designs using stretched membrane with crystallization-induced stress

M. Sasaki, T. Sasaki, K. Hane, H. Miura

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
DOIs	https://doi.org/10.1109/LEOS.2007.4382604
Publication status	Published - 2007

Access to Document

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title = "Optically flat micromirror designs using stretched membrane with crystallization-induced stress",

author = "M. Sasaki and T. Sasaki and K. Hane and H. Miura",

year = "2007",

doi = "10.1109/LEOS.2007.4382604",

language = "undefiniert/unbekannt",

booktitle = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",

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TY - GEN

T1 - Optically flat micromirror designs using stretched membrane with crystallization-induced stress

AU - Sasaki, M.

AU - Sasaki, T.

AU - Hane, K.

AU - Miura, H.

PY - 2007

Y1 - 2007

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-51249101935&partnerID=MN8TOARS

U2 - 10.1109/LEOS.2007.4382604

DO - 10.1109/LEOS.2007.4382604

M3 - Konferenzartikel

BT - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

ER -