Optically flat micromirror designs using stretched membrane with crystallization-induced stress

M. Sasaki, T. Sasaki, K. Hane, H. Miura

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel

Originalsprache	undefiniert/unbekannt
Titel	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
DOIs	https://doi.org/10.1109/LEOS.2007.4382604
Publikationsstatus	Veröffentlicht - 2007

Zugriff auf Dokument

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title = "Optically flat micromirror designs using stretched membrane with crystallization-induced stress",

author = "M. Sasaki and T. Sasaki and K. Hane and H. Miura",

year = "2007",

doi = "10.1109/LEOS.2007.4382604",

language = "undefiniert/unbekannt",

booktitle = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",

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T1 - Optically flat micromirror designs using stretched membrane with crystallization-induced stress

AU - Sasaki, M.

AU - Sasaki, T.

AU - Hane, K.

AU - Miura, H.

PY - 2007

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M3 - Konferenzartikel

BT - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

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