Optical scanner with deformable mirror fabricated from SOI wafer

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
DOIs	https://doi.org/10.1109/OMEMS.2008.4607846
Publication status	Published - 2008

Access to Document

@inproceedings{3d3ee8ed697c49f0af1a077954ef9d8b,

title = "Optical scanner with deformable mirror fabricated from SOI wafer",

author = "T. Sasaki and K. Hane",

year = "2008",

doi = "10.1109/OMEMS.2008.4607846",

language = "undefiniert/unbekannt",

booktitle = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS",

}

TY - GEN

T1 - Optical scanner with deformable mirror fabricated from SOI wafer

AU - Sasaki, T.

AU - Hane, K.

PY - 2008

Y1 - 2008

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-54049156923&partnerID=MN8TOARS

U2 - 10.1109/OMEMS.2008.4607846

DO - 10.1109/OMEMS.2008.4607846

M3 - Konferenzartikel

BT - 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

ER -