Original language | Undefined/Unknown |
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Title of host publication | International Conference on Optical MEMS and Nanophotonics |
DOIs | |
Publication status | Published - 2014 |
Optical position detection for MOEMS scanner mirrors with arbitrary trajectories
A. Tortschanoff, M. Baumgart, D. Holzmann, C. Mayer, T. Sandner, A. Kenda
Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review