Optical position detection for MOEMS scanner mirrors with arbitrary trajectories

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung

Originalsprache	undefiniert/unbekannt
Titel	International Conference on Optical MEMS and Nanophotonics
DOIs	https://doi.org/10.1109/OMN.2014.6924557
Publikationsstatus	Veröffentlicht - 2014

Zugriff auf Dokument

@inproceedings{94e9b6e4487b40b6a596cfa32d5f7fe9,

title = "Optical position detection for MOEMS scanner mirrors with arbitrary trajectories",

author = "A. Tortschanoff and M. Baumgart and D. Holzmann and C. Mayer and T. Sandner and A. Kenda",

year = "2014",

doi = "10.1109/OMN.2014.6924557",

language = "undefiniert/unbekannt",

booktitle = "International Conference on Optical MEMS and Nanophotonics",

}

TY - GEN

T1 - Optical position detection for MOEMS scanner mirrors with arbitrary trajectories

AU - Tortschanoff, A.

AU - Baumgart, M.

AU - Holzmann, D.

AU - Mayer, C.

AU - Sandner, T.

AU - Kenda, A.

PY - 2014

Y1 - 2014

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84908052382&partnerID=MN8TOARS

U2 - 10.1109/OMN.2014.6924557

DO - 10.1109/OMN.2014.6924557

M3 - Konferenzartikel

BT - International Conference on Optical MEMS and Nanophotonics

ER -