Nonlinearity compensation of micro-mirror hard-spring by electrostatic combs

T. Izawa, T. Sasaki, K. Hane

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
DOIs	https://doi.org/10.1109/TRANSDUCERS.2017.7994460
Publication status	Published - 2017

Access to Document

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title = "Nonlinearity compensation of micro-mirror hard-spring by electrostatic combs",

author = "T. Izawa and T. Sasaki and K. Hane",

year = "2017",

doi = "10.1109/TRANSDUCERS.2017.7994460",

language = "undefiniert/unbekannt",

booktitle = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",

}

TY - GEN

T1 - Nonlinearity compensation of micro-mirror hard-spring by electrostatic combs

AU - Izawa, T.

AU - Sasaki, T.

AU - Hane, K.

PY - 2017

Y1 - 2017

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U2 - 10.1109/TRANSDUCERS.2017.7994460

DO - 10.1109/TRANSDUCERS.2017.7994460

M3 - Konferenzartikel

BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

ER -