Nonlinear spring tuning by electrostatic combs in micro mirror scanner

K. Hane, T. Izawa, T. Sasaki

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018
DOIs	https://doi.org/10.1109/DTIP.2018.8394239
Publication status	Published - 2018

Access to Document

@inproceedings{c118c3f3fca84339a8ce3f291ef1e0b1,

title = "Nonlinear spring tuning by electrostatic combs in micro mirror scanner",

author = "K. Hane and T. Izawa and T. Sasaki",

year = "2018",

doi = "10.1109/DTIP.2018.8394239",

language = "undefiniert/unbekannt",

booktitle = "Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018",

}

TY - GEN

T1 - Nonlinear spring tuning by electrostatic combs in micro mirror scanner

AU - Hane, K.

AU - Izawa, T.

AU - Sasaki, T.

PY - 2018

Y1 - 2018

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85050209236&partnerID=MN8TOARS

U2 - 10.1109/DTIP.2018.8394239

DO - 10.1109/DTIP.2018.8394239

M3 - Konferenzartikel

BT - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018

ER -