Nanopatterned polymethylpentene substrates fabricated by injection molding for biophotonic applications

R. Hainberger; R. Bruck; N. Kataeva; R. Heer; A. Köck; P. Czepl; K. Kaiblinger; F. Pipelka; B. Bilenberg

doi:10.1016/j.mee.2009.11.066

Nanopatterned polymethylpentene substrates fabricated by injection molding for biophotonic applications

R. Hainberger, R. Bruck, N. Kataeva, R. Heer, A. Köck, P. Czepl, K. Kaiblinger, F. Pipelka, B. Bilenberg

Research output: Contribution to journal › Article › peer-review

Abstract

This paper reports the well-controlled replication of nanostructures with features sizes as small as 50 nm on the surface of polymethylpentene (PMP) substrates by injection molding. A 2″ silicon wafer carrying the nanostructures served as exchangeable mold insert. This PMP injection molding process is aimed at developing a planar optical polymer waveguide platform for evanescent wave sensing. In particular we focus on disposable polymer optical biochips for the label-free detection of bio-molecules. © 2009 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	821-823
Number of pages	3
Journal	Microelectronic Engineering
Volume	87
Issue number	5-8
DOIs	https://doi.org/10.1016/j.mee.2009.11.066
Publication status	Published - 2010
Externally published	Yes

Keywords

Biophotonic applications
Evanescent wave sensing
Injection molding process
Label-free detection
Mold inserts
NanoPatterning
Optical bio-sensors
Optical biochip
Optical biosensor
Optical polymer waveguides
Polymethylpentene
Bioassay
Biochips
Biosensors
Injection molding
Nanostructures
Optical waveguides
Semiconducting silicon compounds
Silicon wafers
Waveguides
Plastic molds

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10.1016/j.mee.2009.11.066

https://www.scopus.com/inward/record.uri?eid=2-s2.0-76949091467&doi=10.1016%2fj.mee.2009.11.066&partnerID=40&md5=030301542b769316d7b3f20740e6fd0a

Cite this

@article{97e0a3e762274074a35680756ffe694b,

title = "Nanopatterned polymethylpentene substrates fabricated by injection molding for biophotonic applications",

abstract = "This paper reports the well-controlled replication of nanostructures with features sizes as small as 50 nm on the surface of polymethylpentene (PMP) substrates by injection molding. A 2″ silicon wafer carrying the nanostructures served as exchangeable mold insert. This PMP injection molding process is aimed at developing a planar optical polymer waveguide platform for evanescent wave sensing. In particular we focus on disposable polymer optical biochips for the label-free detection of bio-molecules. {\textcopyright} 2009 Elsevier B.V. All rights reserved.",

keywords = "Biophotonic applications, Evanescent wave sensing, Injection molding process, Label-free detection, Mold inserts, NanoPatterning, Optical bio-sensors, Optical biochip, Optical biosensor, Optical polymer waveguides, Polymethylpentene, Bioassay, Biochips, Biosensors, Injection molding, Nanostructures, Optical waveguides, Semiconducting silicon compounds, Silicon wafers, Waveguides, Plastic molds",

author = "R. Hainberger and R. Bruck and N. Kataeva and R. Heer and A. K{\"o}ck and P. Czepl and K. Kaiblinger and F. Pipelka and B. Bilenberg",

note = "cited By 10",

year = "2010",

doi = "10.1016/j.mee.2009.11.066",

language = "English",

volume = "87",

pages = "821--823",

number = "5-8",

}

TY - JOUR

T1 - Nanopatterned polymethylpentene substrates fabricated by injection molding for biophotonic applications

AU - Hainberger, R.

AU - Bruck, R.

AU - Kataeva, N.

AU - Heer, R.

AU - Köck, A.

AU - Czepl, P.

AU - Kaiblinger, K.

AU - Pipelka, F.

AU - Bilenberg, B.

N1 - cited By 10

PY - 2010

Y1 - 2010

N2 - This paper reports the well-controlled replication of nanostructures with features sizes as small as 50 nm on the surface of polymethylpentene (PMP) substrates by injection molding. A 2″ silicon wafer carrying the nanostructures served as exchangeable mold insert. This PMP injection molding process is aimed at developing a planar optical polymer waveguide platform for evanescent wave sensing. In particular we focus on disposable polymer optical biochips for the label-free detection of bio-molecules. © 2009 Elsevier B.V. All rights reserved.

AB - This paper reports the well-controlled replication of nanostructures with features sizes as small as 50 nm on the surface of polymethylpentene (PMP) substrates by injection molding. A 2″ silicon wafer carrying the nanostructures served as exchangeable mold insert. This PMP injection molding process is aimed at developing a planar optical polymer waveguide platform for evanescent wave sensing. In particular we focus on disposable polymer optical biochips for the label-free detection of bio-molecules. © 2009 Elsevier B.V. All rights reserved.

KW - Biophotonic applications

KW - Evanescent wave sensing

KW - Injection molding process

KW - Label-free detection

KW - Mold inserts

KW - NanoPatterning

KW - Optical bio-sensors

KW - Optical biochip

KW - Optical biosensor

KW - Optical polymer waveguides

KW - Polymethylpentene

KW - Bioassay

KW - Biochips

KW - Biosensors

KW - Injection molding

KW - Nanostructures

KW - Optical waveguides

KW - Semiconducting silicon compounds

KW - Silicon wafers

KW - Waveguides

KW - Plastic molds

U2 - 10.1016/j.mee.2009.11.066

DO - 10.1016/j.mee.2009.11.066

M3 - Article

VL - 87

SP - 821

EP - 823

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 5-8

ER -

Nanopatterned polymethylpentene substrates fabricated by injection molding for biophotonic applications

Abstract

Keywords

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