Abstract
This paper reports the well-controlled replication of nanostructures with features sizes as small as 50 nm on the surface of polymethylpentene (PMP) substrates by injection molding. A 2″ silicon wafer carrying the nanostructures served as exchangeable mold insert. This PMP injection molding process is aimed at developing a planar optical polymer waveguide platform for evanescent wave sensing. In particular we focus on disposable polymer optical biochips for the label-free detection of bio-molecules. © 2009 Elsevier B.V. All rights reserved.
Originalsprache | Englisch |
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Seiten (von - bis) | 821-823 |
Seitenumfang | 3 |
Fachzeitschrift | Microelectronic Engineering |
Jahrgang | 87 |
Ausgabenummer | 5-8 |
DOIs | |
Publikationsstatus | Veröffentlicht - 2010 |
Extern publiziert | Ja |