Nanopatterned polymethylpentene substrates fabricated by injection molding for biophotonic applications

R. Hainberger, R. Bruck, N. Kataeva, R. Heer, A. Köck, P. Czepl, K. Kaiblinger, F. Pipelka, B. Bilenberg

Publikation: Beitrag in FachzeitschriftArtikelBegutachtung

Abstract

This paper reports the well-controlled replication of nanostructures with features sizes as small as 50 nm on the surface of polymethylpentene (PMP) substrates by injection molding. A 2″ silicon wafer carrying the nanostructures served as exchangeable mold insert. This PMP injection molding process is aimed at developing a planar optical polymer waveguide platform for evanescent wave sensing. In particular we focus on disposable polymer optical biochips for the label-free detection of bio-molecules. © 2009 Elsevier B.V. All rights reserved.
OriginalspracheEnglisch
Seiten (von - bis)821-823
Seitenumfang3
FachzeitschriftMicroelectronic Engineering
Jahrgang87
Ausgabenummer5-8
DOIs
PublikationsstatusVeröffentlicht - 2010
Extern publiziertJa

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