Micro-mirrors connected in series for loss-mechanism study and low-voltage operation

S. Kotani, H.M. Chu, T. Sasaki, K. Hane

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969711
Publication status	Published - 2011

Access to Document

@inproceedings{74dcff28f620494986da9aac375455bc,

title = "Micro-mirrors connected in series for loss-mechanism study and low-voltage operation",

author = "S. Kotani and H.M. Chu and T. Sasaki and K. Hane",

year = "2011",

doi = "10.1109/TRANSDUCERS.2011.5969711",

language = "undefiniert/unbekannt",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

}

TY - GEN

T1 - Micro-mirrors connected in series for loss-mechanism study and low-voltage operation

AU - Kotani, S.

AU - Chu, H.M.

AU - Sasaki, T.

AU - Hane, K.

PY - 2011

Y1 - 2011

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-80052112578&partnerID=MN8TOARS

U2 - 10.1109/TRANSDUCERS.2011.5969711

DO - 10.1109/TRANSDUCERS.2011.5969711

M3 - Konferenzartikel

BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

ER -