Micro-mirrors connected in series for loss-mechanism study and low-voltage operation

S. Kotani, H.M. Chu, T. Sasaki, K. Hane

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel

Originalsprache	undefiniert/unbekannt
Titel	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969711
Publikationsstatus	Veröffentlicht - 2011

Zugriff auf Dokument

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language = "undefiniert/unbekannt",

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AU - Kotani, S.

AU - Chu, H.M.

AU - Sasaki, T.

AU - Hane, K.

PY - 2011

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