MEMS Shutters for Smart Slit Assembly

Anton Lagosh, Gergely Huszka, Niels Quack

Research output: Contribution to conference (No Proceedings)Posterpeer-review

Original languageEnglish
Publication statusPublished - 2021
EventEPFL - MicroNanoFabrication Annual Review Meeting 2020 - Lausanne, Switzerland
Duration: 5 May 20205 May 2020

Conference

ConferenceEPFL - MicroNanoFabrication Annual Review Meeting 2020
Country/TerritorySwitzerland
CityLausanne
Period5/05/205/05/20

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