Low Stress Solution of Anodic Bonding Technology with SW-YY® Glass for Sensitive MEMS

Xiaodong Hu, Piotr Mackowiak, Manuel Baeuscher, Yucheng Zhang, Bei Wang, Ulli Hansen, Simon Maus, Oliver Gyenge, Oswin Ehrmann, Klaus-Dieter Lang, Ha-Duong Ngo

    Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

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    Physics & Astronomy