Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

Victor Plessky; Soumya Yandrapalli; Patrick J. Turner; Luis Guillermo Villanueva; Julius Koskela; Muhammad Faizan; Annalisa De Pastina; Bryant Garcia; Jim Costa; Robert B. Hammond

doi:10.1109/MWSYM.2019.8700876

Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

Victor Plessky, Soumya Yandrapalli, Patrick J. Turner, Luis Guillermo Villanueva, Julius Koskela, Muhammad Faizan, Annalisa De Pastina, Bryant Garcia, Jim Costa, Robert B. Hammond

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Abstract

In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis. The resonance frequency of around 4.8GHz and 13.6GHz are suitable for development of RF filters. The XBARs 3rd, 5th and even 9th harmonics were observed up to 38 GHz.

Original language	English
Title of host publication	2019 IEEE MTT-S International Microwave Symposium (IMS2019)
DOIs	https://doi.org/10.1109/MWSYM.2019.8700876
Publication status	Published - Jun 2019
Externally published	Yes
Event	2019 IEEE MTT-S International Microwave Symposium (IMS) - Boston, MA, USA Duration: 2 Jun 2019 → 7 Jun 2019

Conference

Conference	2019 IEEE MTT-S International Microwave Symposium (IMS)
Period	2/06/19 → 7/06/19

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10.1109/MWSYM.2019.8700876

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Plessky, V., Yandrapalli, S., Turner, P. J., Villanueva, L. G., Koskela, J., Faizan, M., De Pastina, A., Garcia, B., Costa, J., & Hammond, R. B. (2019). Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters. In 2019 IEEE MTT-S International Microwave Symposium (IMS2019) https://doi.org/10.1109/MWSYM.2019.8700876

@inproceedings{dc0a5bed8ce941b0862d1d1e99aa6371,

title = "Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters",

abstract = "In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis. The resonance frequency of around 4.8GHz and 13.6GHz are suitable for development of RF filters. The XBARs 3rd, 5th and even 9th harmonics were observed up to 38 GHz.",

author = "Victor Plessky and Soumya Yandrapalli and Turner, {Patrick J.} and Villanueva, {Luis Guillermo} and Julius Koskela and Muhammad Faizan and {De Pastina}, Annalisa and Bryant Garcia and Jim Costa and Hammond, {Robert B.}",

year = "2019",

month = jun,

doi = "10.1109/MWSYM.2019.8700876",

language = "English",

booktitle = "2019 IEEE MTT-S International Microwave Symposium (IMS2019)",

note = "2019 IEEE MTT-S International Microwave Symposium (IMS) ; Conference date: 02-06-2019 Through 07-06-2019",

}

Plessky, V, Yandrapalli, S, Turner, PJ, Villanueva, LG, Koskela, J, Faizan, M, De Pastina, A, Garcia, B, Costa, J & Hammond, RB 2019, Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters. in 2019 IEEE MTT-S International Microwave Symposium (IMS2019). 2019 IEEE MTT-S International Microwave Symposium (IMS), 2/06/19. https://doi.org/10.1109/MWSYM.2019.8700876

TY - GEN

T1 - Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

AU - Plessky, Victor

AU - Yandrapalli, Soumya

AU - Turner, Patrick J.

AU - Villanueva, Luis Guillermo

AU - Koskela, Julius

AU - Faizan, Muhammad

AU - De Pastina, Annalisa

AU - Garcia, Bryant

AU - Costa, Jim

AU - Hammond, Robert B.

PY - 2019/6

Y1 - 2019/6

N2 - In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis. The resonance frequency of around 4.8GHz and 13.6GHz are suitable for development of RF filters. The XBARs 3rd, 5th and even 9th harmonics were observed up to 38 GHz.

AB - In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis. The resonance frequency of around 4.8GHz and 13.6GHz are suitable for development of RF filters. The XBARs 3rd, 5th and even 9th harmonics were observed up to 38 GHz.

U2 - 10.1109/MWSYM.2019.8700876

DO - 10.1109/MWSYM.2019.8700876

M3 - Conference Paper

BT - 2019 IEEE MTT-S International Microwave Symposium (IMS2019)

T2 - 2019 IEEE MTT-S International Microwave Symposium (IMS)

Y2 - 2 June 2019 through 7 June 2019

ER -

Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

Abstract

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