Abstract
In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis. The resonance frequency of around 4.8GHz and 13.6GHz are suitable for development of RF filters. The XBARs 3rd, 5th and even 9th harmonics were observed up to 38 GHz.
Originalsprache | Englisch |
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Titel | 2019 IEEE MTT-S International Microwave Symposium (IMS2019) |
DOIs | |
Publikationsstatus | Veröffentlicht - Juni 2019 |
Extern publiziert | Ja |
Veranstaltung | 2019 IEEE MTT-S International Microwave Symposium (IMS) - Boston, MA, USA Dauer: 2 Juni 2019 → 7 Juni 2019 |
Konferenz
Konferenz | 2019 IEEE MTT-S International Microwave Symposium (IMS) |
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Zeitraum | 2/06/19 → 7/06/19 |