Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

Victor Plessky, Soumya Yandrapalli, Patrick J. Turner, Luis Guillermo Villanueva, Julius Koskela, Muhammad Faizan, Annalisa De Pastina, Bryant Garcia, Jim Costa, Robert B. Hammond

Publikation: Konferenzband/Beitrag in Buch/BerichtKonferenzartikelBegutachtung

Abstract

In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis. The resonance frequency of around 4.8GHz and 13.6GHz are suitable for development of RF filters. The XBARs 3rd, 5th and even 9th harmonics were observed up to 38 GHz.
OriginalspracheEnglisch
Titel2019 IEEE MTT-S International Microwave Symposium (IMS2019)
DOIs
PublikationsstatusVeröffentlicht - Juni 2019
Extern publiziertJa
Veranstaltung2019 IEEE MTT-S International Microwave Symposium (IMS) - Boston, MA, USA
Dauer: 2 Juni 20197 Juni 2019

Konferenz

Konferenz2019 IEEE MTT-S International Microwave Symposium (IMS)
Zeitraum2/06/197/06/19

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